“Lollipop-shaped” high-sensitivity Microelectromechanical Systems vector hydrophone based on Parylene encapsulation
- 22 July 2015
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 118 (4)
- https://doi.org/10.1063/1.4927333
Abstract
No abstract availableFunding Information
- 863 program of China (2013AA09A412)
- National Natural Science Foundation of China (61127008/F040703)
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