Determination of elastic modulus of thin films and small specimens using beam bending methods
- 1 May 1999
- journal article
- Published by Springer Science and Business Media LLC in Journal of Materials Research
- Vol. 14 (5), 2152-2161
- https://doi.org/10.1557/jmr.1999.0291
Abstract
Elastic modulus of small specimens and thin films can be determined in bending tests using cantilever or three-point arrangement. The paper presents the basic formulae for these measurements, analyzes the errors which can arise, and shows how they can be reduced. The use of the method is illustrated on glass, silicon, and glass coated with TbDyFe.Keywords
This publication has 19 references indexed in Scilit:
- Determination of elastic modulus of thin layers using nanoindentationJournal of Materials Research, 1997
- Giant magnetostrictive thin film materials and applicationsJournal of Alloys and Compounds, 1997
- Giant magnetostrictive TbFe/Fe multilayersJournal of Alloys and Compounds, 1997
- Elastic modulus of TbDyFe films—a comparison of nanoindentation and bending measurementsThin Solid Films, 1996
- Mechanical property characterization of thin films using spherical tipped indentersThin Solid Films, 1994
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- A new and simple micromechanical approach to the stress-strain characterization of thin coatingsJournal of Micromechanics and Microengineering, 1991
- Micromechanical fracture strength of siliconJournal of Applied Physics, 1990
- Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin filmsJournal of Materials Research, 1988
- Contact MechanicsJournal of Tribology, 1986