Tensile strained epitaxial Ge films on Si(100) substrates with potential application in L-band telecommunications
- 9 February 2004
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 84 (6), 906-908
- https://doi.org/10.1063/1.1645677
Abstract
Tensile strained epitaxialGefilms were grown on Si(100) substrates by ultra-high vacuum chemical vapor deposition. The tensile strain was induced by the thermal expansion coefficient mismatch between Si and Ge during the cooling process from elevated growth temperatures, which induces narrowing of the Ge direct band gap, E g Γ , and pushes the absorptionspectrum of Ge toward longer wavelengths. The E g Γ versus strain relation was measured experimentally by photoreflectance and x-ray diffraction, and the result agrees well with calculations by deformation potential theory. With an in-plane tensile strain of 0.21%, the E g Γ of the Gefilmgrown at 800 °C decreased from 32 meV to 0.768 eV compared with 0.80 for bulk Ge, and corresponded to an absorption edge at 1610 nm. The broadened absorptionspectrum of tensile strained Ge makes it promising as a Si-compatible photodector material for L -band (1560–1620 nm) optical communications.Keywords
This publication has 7 references indexed in Scilit:
- Strain-induced band gap shrinkage in Ge grown on Si substrateApplied Physics Letters, 2003
- Photons to the Rescue: Microelectronics Becomes MicrophotonicsThe Electrochemical Society Interface, 2000
- High-quality Ge epilayers on Si with low threading-dislocation densitiesApplied Physics Letters, 1999
- Band lineups and deformation potentials in the model-solid theoryPhysical Review B, 1989
- Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 KJournal of Applied Physics, 1984
- Piezo-Electroreflectance in Ge, GaAs, and SiPhysical Review B, 1968
- Determination of thermal expansion of germanium, rhodium and iridium by X-raysActa Crystallographica Section A, 1968