Substrate temperature dependence of structure and resistivity of SrRuO3 thin films grown by pulsed laser deposition on (100) SrTiO3

Abstract

The resistivity of SrRuO₃ thin films on (001) SrTiO₃ substrates grown at different temperatures by pulsed laser deposition is correlated to the microstructure. Films grown at 775 °C are of an orthorhombic structure, contain very few defects, and exhibit a low resistivity of 150 μΩ cm. Films grown at other temperatures contain a cubic phase and show higher resistivities. The defects present in the films, particularly twins and antiphase boundaries, are analyzed by high-resolution transmission electron microscopy, and their origin, as well as influence on film resistivity, is discussed.