Rankings
Publications
Sources
Publishers
Scholars
Organizations
About
Login
Register
Home
Publications
Manufacturing of 3D structures for micro-tools using laser ablation
Home
Publications
Manufacturing of 3D structures for micro-tools using laser ablation
Manufacturing of 3D structures for micro-tools using laser ablation
Peter Heyl
Peter Heyl
Thomas Olschewski
Thomas Olschewski
RW
Roelof W. Wijnaendts
Roelof W. Wijnaendts
Publisher Website
Google Scholar
Cite
Download
Share
Download
24 August 2001
journal article
Published by
Elsevier BV
in
Microelectronic Engineering
Vol. 57-58
,
775-780
https://doi.org/10.1016/s0167-9317(01)00485-3
Abstract
No abstract available
Keywords
LASER ABLATION
3D STRUCTURING
EMBOSSING
MICRO STRUCTURING
Cited by 38 articles