Limits of quality factor in bulk-mode micromechanical resonators
- 1 January 2008
- conference paper
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE) in 2008 IEEE 21st International Conference on Micro Electro Mechanical Systems
- No. 10846999,p. 74-77
- https://doi.org/10.1109/memsys.2008.4443596
Abstract
In this paper we present the dominant energy loss mechanisms and quality factor (Q) limits in bulk mode micromechanical resonators. We demonstrate that in resonators with an appropriately designed stem connection to anchor the maximum achievable Q limit is set by either Thermoelastic dissipation (TED) or the Akhieser effect (AKE). Furthermore, we suggest a choice of materials for achieving maximum Q's in micromechanical resonators. It is established here that silicon resonators can theoretically achieve higher Q's than quartz and we predict that by using alternative materials, such as silicon carbide, it is possible to surpass the Q of quartz by more than an order of magnitude.Keywords
This publication has 3 references indexed in Scilit:
- Engineering MEMS Resonators With Low Thermoelastic DampingJournal of Microelectromechanical Systems, 2006
- Micromechanical "hollow-disk" ring resonatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2004
- Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator ApplicationsIEEE Electron Device Letters, 2004