Design and evaluation of a mechanical nanomanufacturing system for nanomilling
- 31 January 2012
- journal article
- Published by Elsevier BV in Precision Engineering
- Vol. 36 (1), 19-30
- https://doi.org/10.1016/j.precisioneng.2011.06.001
Abstract
No abstract availableKeywords
This publication has 30 references indexed in Scilit:
- New Approaches to Nanofabrication: Molding, Printing, and Other TechniquesChemical Reviews, 2005
- Diamond turning of large off-axis aspheric mirrors using a fast tool servo with on-machine measurementJournal of the American Academy of Dermatology, 2004
- Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoderPrecision Engineering, 2003
- Nanofabrication: Conventional and nonconventional methodsElectrophoresis, 2001
- Construction and testing of a nanomachining instrumentPrecision Engineering, 2000
- Experiments Using a Nano-Machining Instrument for Nano-Cutting Brittle MaterialsCIRP Annals, 2000
- Effect of Tool Edge Geometry on the Nanometric Cutting of GeCIRP Annals, 1998
- Nanometer-Scale Surface Modification Using the Scanning Probe Microscope: Progress since 1991Chemical Reviews, 1997
- From micro‐ to nano‐machining – towards the nanometre eraSensor Review, 1996
- Design and construction of an ultraprecision 84 inch diamond turning machinePrecision Engineering, 1979