Control of the plasma chemistry of a pulsed inductively coupled methane plasma
- 15 June 2005
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 14 (3), 543-548
- https://doi.org/10.1088/0963-0252/14/3/017
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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