Growth of SiC by ?Hot-Wall? CVD and HTCVD

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1 July 1997

journal article
research article
Published by Wiley in Physica Status Solidi (b)

Vol. 202 (1), 321-334
https://doi.org/10.1002/1521-3951(199707)202:1<321::aid-pssb321>3.0.co;2-h

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Cited by 119 articles