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Single Crystal Growth of 6H-SiC by a Vacuum Sublimation Method
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Single Crystal Growth of 6H-SiC by a Vacuum Sublimation Method
Single Crystal Growth of 6H-SiC by a Vacuum Sublimation Method
KK
Kazuyuki Koga
Kazuyuki Koga
TN
Toshitake Nakata
Toshitake Nakata
TN
Tatsuhiko Niina
Tatsuhiko Niina
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1 January 1985
conference paper
conference paper
Published by
Japan Society of Applied Physics
https://doi.org/10.7567/ssdm.1985.b-3-8
Abstract
1985 Conference on Solid State Devices and Materials,Search for presentations
Keywords
CRYSTAL GROWTH
SIC
SINGLE CRYSTAL
STATE DEVICES
VACUUM SUBLIMATION
GROWTH OF 6H
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Cited by 3 articles