Terahertz vacuum electronic circuits fabricated by UV lithographic molding and deep reactive ion etching
- 2 November 2009
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 95 (18), 181505
- https://doi.org/10.1063/1.3259823
Abstract
The 0.22 THz vacuum electronic circuits fabricated by UV lithography molding and deep reactive ion etching processes are under investigation for submillimeter wave applications. Eigenmode transient simulations show that, accounting for realistic values of our currently achievable fabrication tolerances, the transmission, and dispersion properties of the operation modes of a TE-mode, staggered, double grating circuit are maintained within less than 1 dB and 2% deviation, respectively. Scanning electron microscopy and atomic force microscopy analyses of the fabricated circuit samples demonstrate that both of the microelectromechanical system fabrication approaches produce circuits with ±3–5 μm dimensional tolerance and ∼30 nm surface roughness.Keywords
This publication has 11 references indexed in Scilit:
- Strongly confined plasmonic wave propagation through an ultrawideband staggered double grating waveguideApplied Physics Letters, 2008
- Intense wideband terahertz amplification using phase shifted periodic electron-plasmon couplingApplied Physics Letters, 2008
- Microfabrication of millimeter wave vacuum electron devices by two-step deep-etch x-ray lithographyApplied Physics Letters, 2006
- Single-mask, three-dimensional microfabrication of high-aspect-ratio structures in bulk silicon using reactive ion etching lag and sacrificial oxidationApplied Physics Letters, 2004
- Surface plasmon subwavelength opticsNature, 2003
- Applications and Outlook for Electronic Terahertz TechnologyOptics and Photonics News, 2003
- High aspect ratio patterning with a proximity ultraviolet sourceMicroelectronic Engineering, 2002
- Quantum Cascade LaserScience, 1994
- Terahertz beamsApplied Physics Letters, 1989
- Cherenkov Radiation from Femtosecond Optical Pulses in Electro-Optic MediaPhysical Review Letters, 1984