Oxynitride Deposition Kinetics in a SiH4 ‐ CO 2 ‐ NH 3 ‐ H 2 System

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1 April 1977

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 124 (4), 599-606
https://doi.org/10.1149/1.2133357

Abstract

No abstract available

Cited by 18 articles