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Successive Growth of Si and SiO[sub 2] in Epitaxial Apparatus
Home
Publications
Successive Growth of Si and SiO[sub 2] in Epitaxial Apparatus
Successive Growth of Si and SiO[sub 2] in Epitaxial Apparatus
WS
W. Steinmaier
W. Steinmaier
JB
J. Bloem
J. Bloem
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1 January 1964
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 111
(2)
,
206
https://doi.org/10.1149/1.2426084
Abstract
No abstract available
Keywords
SUCCESSIVE GROWTH
EPITAXIAL APPARATUS
SUB
GROWTH OF SI
SI AND SIO
Cited by 15 articles