Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
- 1 February 2004
- journal article
- research article
- Published by Springer Science and Business Media LLC in Applied Physics A
- Vol. 78 (3), 381-385
- https://doi.org/10.1007/s00339-002-1938-y
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Dynamics of the Vapor Plume in Laser Materials AblationPublished by Springer Science and Business Media LLC ,1994
- Dynamics of laser annealingAIP Conference Proceedings, 1979