Preparation and structure of carbon film deposited by a mass-separated C+ ion beam

Abstract

Carbon films were deposited using mass‐separated C⁺ ions of 300 and 600 eV. The films have diamond‐like characteristics such as transparency in the visible spectral region with wavelengths longer than about 650 nm and in the infrared, and high electrical resistivity. Transmission electron diffraction analysis shows that the film is amorphous and does not contain graphitically bonded carbon atoms. K_α x‐ray emission spectrum of the carbon in the film agrees well with that of diamond. In the x‐ray photoemission spectrum of the film, no characteristic energy loss due to π plasmon was observed. The atomic density of the film calculated from the energy loss due to the plasma oscillation of valence electrons is 1.7×10²³ atoms/cm³, which is in good agreement with that of diamond. These results indicate that the film deposited using C⁺ ion beam consists of tetrahedraly bonded carbon atoms.