Silicon-based microelectrodes for neurophysiology fabricated using a gold metallization/nitride passivation system
- 1 June 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 5 (2), 117-121
- https://doi.org/10.1109/84.506199
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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