Abstract
In this paper, we try to use the coating of effective electrode surface and change the direction of polarization to design the mode shape piezoelectric motors of the first three modes. We also com-pare the gain of the mode shape piezoelectric motors with respect to the normal shape piezoelectric motor, including rotational speed, loading ability, torque, phase angle conversion and efficiency. According to the results of theoretical and simulation analysis, we have found that the gain of the mode shape piezoelectric stators are larger than the normal shape piezoelectric stator on average. According to the results of experiments, we found that the gain of the rotational speed, loading ability, torque, driving phase angle conversion and efficiency of the mode shape (MS1 - 3) piezoelectric motors are higher than the normal shape piezoelectric motor (NS) under driving condition of the second vibration mode. Also, the gain of the rotational speed and loading ability of the mode shape 2 (MS2) piezoelectric motor are higher than other shapes piezoelectric motors (NS, MS1 and MS3) under driving condition of the second vibration mode. The used maximum rotational speed of the mode shape 2 (MS2) piezoelectric motor is up to 946 rpm under conditions of 180 Vp-p driving voltage, 10.7 kHz driving frequency, 0o driving phase angle and 13.0 gw net weight. The maximum loading ability and torque of the mode shape 2 (MS2) piezoelectric motor is respectively 451 gw and 0.91 mkgw-m under conditions of 180 Vp-p driving voltage, 10.7 kHz driving frequency, 0o driving phase angle and 173 rpm rotational speed. And the gain of efficiency (output power) and maximum loading ability (torque) of the mode shape 2 (MS2) piezoelectric motor are respectively 2.28 and 1.54 with respect to the normal shape piezoelectric motor under conditions of 180 Vp-p driving voltage, 10.7 kHz driving frequency and 0o driving phase angle. According to the results of the experiments, we have finally found that the piezoelectric motors (NS and MS1 - 3) can be driven only by the second vibration mode because the stator can produce elliptical motion and allows the rotor to generate orientation rotation. However, the first vibration mode can allow the rotor to be rotated very fast but it can’t make the rotation of the rotor orientation. Furthermore, we also found that the rotor can’t rotate by the third vibration mode because its vibration energy is absorbed by the structure itself, so causing the rotor stagnation.

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