1×2 MOEMS switch based on silicon-on-insulator and polymeric waveguides
- 1 January 2002
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 38 (4), 177-178
- https://doi.org/10.1049/el:20020110
Abstract
A new planar optical switch concept based on a silicon-on-insulator microelectromechanical system (MEMS) structure with post-processed polymeric waveguides is reported. The actuation voltage is 20 to 50 V, and the switching time as low as 30 µs. A crosstalk of −32 dB has been measured.Keywords
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