Effect of dimethylamine borane concentration on antireflection properties of silica thin films via redox deposition
- 5 December 2006
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 515 (4), 2513-2518
- https://doi.org/10.1016/j.tsf.2006.07.166
Abstract
No abstract availableKeywords
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