An electron optical theory of beam blanking
- 1 November 1993
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 64 (11), 3169-3190
- https://doi.org/10.1063/1.1144326
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- On the design and effective strength of stigmators for electron beam lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991
- Electron beam blanker opticsJournal of Vacuum Science & Technology B, 1990
- The EBES4 electron-beam columnJournal of Vacuum Science & Technology B, 1987
- High Speed Beam Deflection and Blanking for Electron LithographyJournal of Vacuum Science and Technology, 1973