Structure of TiN coatings deposited at relatively high rates and low temperatures by magnetron sputtering
- 1 January 1988
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 156 (1), 53-64
- https://doi.org/10.1016/0040-6090(88)90282-9
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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