Solid-state dewetting for ordered arrays of crystallographically oriented metal particles
- 14 March 2005
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 86 (12), 121903
- https://doi.org/10.1063/1.1885180
Abstract
We demonstrate that topographically modified substrates can be used as templates to control solid-state dewetting of thin films by creating a periodic variation in the initial curvature of the film. The dewetting of goldfilms on oxidized siliconsurfacespatterned with arrays of inverted pyramid shaped pits is investigated. For specific ranges of relative film thickness and topographic dimension, dewetting results in arrays of submicrometer-scale particles with uniform periodic spacing and nearly uniform size and crystallographic orientation.This publication has 17 references indexed in Scilit:
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