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Nonequilibrium point defects and diffusion in silicon
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Nonequilibrium point defects and diffusion in silicon
Nonequilibrium point defects and diffusion in silicon
SH
S.M. Hu
S.M. Hu
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15 October 1994
journal article
Published by
Elsevier BV
in
Materials Science and Engineering: R: Reports
Vol. 13
(3)
,
105-192
https://doi.org/10.1016/0927-796x(94)90009-4
Abstract
No abstract available
Keywords
SILICON
NONEQUILIBRIUM POINT DEFECTS
SILICIDATION
PREDICTION AND CONTROL
DOPANT DIFFUSION
Cited by 78 articles