250-Å linewidths with PMMA electron resist
- 1 September 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 33 (5), 392-394
- https://doi.org/10.1063/1.90387
Abstract
25‐nm‐wide lines and spaces have been fabricated in 22.5‐nm‐thick films of PdAu (40 : 60) using electron‐beam exposure and polymethylmethacrylate (PMMA) resist. A high‐resolution scanning transmission electron microscopy (STEM) was used to expose the resist and the samples were mounted on 60‐nm‐thick Si3N4 membrane substrates. Previously, the smallest metal structures formed with a resist process were 60 nm wide with spaces between the lines several times larger than the lines. The results presented here show that 25‐nm lines can be fabricated with a center to center spacing of 50 nm.Keywords
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