Parametric frequency tuning of phase-locked nanoelectromechanical resonators
- 19 November 2001
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 79 (21), 3521-3523
- https://doi.org/10.1063/1.1412431
Abstract
We present measurements on nanoelectromechanical systems fabricated in semiconductor materials suited for operating frequencies in the radio band. We demonstrate how to achieve parametric frequency tuning of nanoelectromechanical resonators required for radio frequency sensor and communication applicationsKeywords
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