A New Grinding Method for Ceramics Using a Biaxially Vibrated Nonrotational Ultrasonic Tool
- 31 December 1993
- journal article
- Published by Elsevier BV in CIRP Annals
- Vol. 42 (1), 375-378
- https://doi.org/10.1016/s0007-8506(07)62465-2
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Development of a New Mechanochemical Polishing Method with a Polishing Film for Ceramic Round BarsCIRP Annals, 1992
- Mirror Surface Grinding of Silicon Wafers with Electrolytic In-Process DressingCIRP Annals, 1990
- Highly Efficient Grinding of Ceramics and Hard Metals on Grinding CenterCIRP Annals, 1986