Growth of Aluminum Nitride on Porous Alumina and Silica through Separate Saturated Gas−Solid Reactions of Trimethylaluminum and Ammonia
- 30 January 2002
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 14 (2), 720-729
- https://doi.org/10.1021/cm011176i
Abstract
No abstract availableKeywords
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