3-D MOEMS Mirror for Laser Beam Pointing and Focus Control
- 16 August 2004
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Selected Topics in Quantum Electronics
- Vol. 10 (3), 528-535
- https://doi.org/10.1109/jstqe.2004.828484
Abstract
A biaxial torsion scan mirror with a deformable membrane surface is described. The 700-mm-diameter optical surface can be tilted /spl plusmn/4/spl deg/ about two orthogonal axes and can be deformed to a parabola with greater than 3-mm sag at the membrane center. The surface, therefore, acts as a lens with variable focal length ranging from /spl infin/ to 10 mm. Mirror architecture and applications in three-dimensional beam pointing and scanning are discussed.Keywords
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