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Direct bonding of piezoelectric crystal onto silicon
Home
Publications
Direct bonding of piezoelectric crystal onto silicon
Direct bonding of piezoelectric crystal onto silicon
AN
Akihiko Namba
Akihiko Namba
MS
Masato Sugimoto
Masato Sugimoto
TO
Tetsuyoshi Ogura
Tetsuyoshi Ogura
YT
Yoshihiro Tomita
Yoshihiro Tomita
KE
Kazuo Eda
Kazuo Eda
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27 November 1995
journal article
Published by
AIP Publishing
in
Applied Physics Letters
Vol. 67
(22)
,
3275-3276
https://doi.org/10.1063/1.114896
Abstract
No abstract available
Keywords
MICROSTRUCTURES
PIEZOELECTRIC MATERIAL
Cited by 26 articles