XPS study of the process of oxygen gettering by thin films of PACVD boron
- 30 June 2000
- journal article
- Published by Elsevier BV in Journal of Nuclear Materials
- Vol. 280 (1), 33-38
- https://doi.org/10.1016/s0022-3115(00)00037-4
Abstract
No abstract availableKeywords
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