Mechanically exfoliated graphene mounted on a SiO2/Si substrate was subjected to HF/H2O etching or irradiation by energetic protons. In both cases gas was released from the SiO2 and accumulated at the graphene/SiO2 interface resulting in the formation of “bubbles” in the graphene sheet. Formation of these “bubbles” demonstrates the robust nature of single layer graphene membranes, which are capable of containing mesoscopic volumes of gas. In addition, effective mass transport at the graphene/SiO2 interface has been observed.