Precise wavelength control for DFB laser diodes by novel corrugation delineation method
- 1 March 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 9 (3), 288-290
- https://doi.org/10.1109/68.556049
Abstract
Precise wavelength control of a multiple-wavelength DFB InGaAsP strained MQW laser-diode (LD) array was achieved using weighted-dose allocation variable-pitch EB-lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 μm /spl lambda//4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the wavelength was as low as 0.37 nm over 2-in wafers.Keywords
This publication has 8 references indexed in Scilit:
- Wavelength accuracy and output power of multiwavelength DFB laser arrays with integrated star couplers and optical amplifiersIEEE Photonics Technology Letters, 1996
- Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser arrayJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- Wavelength uniformity in λ/4 shifted DFB laser array WDM transmittersElectronics Letters, 1995
- Low threshold λ = 1.3 μm multi-quantum well laser diodes grown by metalorganic vapor phase epitaxy using tertiarybutylarsine and tertiarybutylphosphine precursorsJournal of Crystal Growth, 1994
- Multiwavelength distributed Bragg reflector laser array fabricated using near field holographic printing with an electron-beam generated phase grating maskJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- GaAs/AlGaAs first-order gratings fabricated with electron beam lithography and very-narrow-linewidth long-cavity DBR laser diodesIEEE Journal of Quantum Electronics, 1993
- Multiple-phase shift super structure grating DBR lasers for broad wavelength tuningIEEE Photonics Technology Letters, 1993
- The effect of stitching errors on the spectral characteristics of DFB lasers fabricated using electron beam lithographyJournal of Lightwave Technology, 1992