Solid immersion microscope
- 10 December 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (24), 2615-2616
- https://doi.org/10.1063/1.103828
Abstract
A new type of real-time optical microscope has been developed that operates on the same principle as a liquid immersion microscope, with the liquid replaced by a solid lens of high refractive index material. Using a lens with an index n=2 and 436 nm illumination, this microscope has resolved 100 nm lines and spaces and has demonstrated a factor of two improvement in the edge response over a confocal microscope.Keywords
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