An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging
Open Access
- 26 July 2013
- Vol. 13 (8), 9624-9634
- https://doi.org/10.3390/s130809624
Abstract
A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 × 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 μm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.Keywords
This publication has 17 references indexed in Scilit:
- A Novel Solid-State Thermal Rectifier Based On Reduced Graphene OxideScientific Reports, 2012
- Static behavior of a graphene-based sound-emitting deviceNanoscale, 2012
- Single-layer graphene sound-emitting devices: experiments and modelingNanoscale, 2012
- Graphene-on-Paper Sound Source DevicesACS Nano, 2011
- Integration of trench-isolated through-wafer interconnects with 2d capacitive micromachined ultrasonic transducer arraysSensors and Actuators A: Physical, 2007
- PMUT: a web-based tool for the annotation of pathological mutations on proteinsBioinformatics, 2005
- Analytical 2D model of transducer arrays for predicting elementary electroacoustic response and directivity patternPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Cost-effective and manufacturable route to the fabrication of high-density 2D micromachined ultrasonic transducer arrays and (CMOS) signal conditioning electronics on the same silicon substratePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Silicon-Based PbTiO3/Pb(Zr, Ti)O3/PbTiO3 Sandwich StructureJapanese Journal of Applied Physics, 2001
- Ultrasonography in medical imaging influence on diagnostic routinesClinical Imaging, 1994