Patterning of transparent conducting oxide thin films by wet etching for a-Si:H TFT-LCDs
- 1 December 1996
- journal article
- Published by Springer Science and Business Media LLC in Journal of Electronic Materials
- Vol. 25 (12), 1806-1817
- https://doi.org/10.1007/bf02657158
Abstract
No abstract availableKeywords
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