Characteristics of Silicon Oxynitride Barrier Films Grown on Poly(ethylene naphthalate) by Ion-Beam-Assisted Deposition
- 20 May 2010
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 49 (5), 05EA14
- https://doi.org/10.1143/jjap.49.05ea14
Abstract
No abstract availableKeywords
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