Practical estimation of measurement noise and flatness deviation on focus variation microscopes
- 1 January 2014
- journal article
- Published by Elsevier BV in CIRP Annals
- Vol. 63 (1), 545-548
- https://doi.org/10.1016/j.cirp.2014.03.086
Abstract
No abstract availableKeywords
Funding Information
- Micro-Manufacturing Applications (MIDEMMA) (FP7-2011-NMP-ICT-FoF-285614)
This publication has 3 references indexed in Scilit:
- Calibration of the scales of areal surface topography measuring instruments: part 3. ResolutionMeasurement Science and Technology, 2013
- Calibration of the scales of areal surface topography measuring instruments: part 2. Amplification, linearity and squarenessMeasurement Science and Technology, 2012
- Calibration of the scales of areal surface topography-measuring instruments: part 1. Measurement noise and residual flatnessMeasurement Science and Technology, 2012