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Modeling the transitions from capacitive to inductive to wave-sustained rf discharges
Home
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Modeling the transitions from capacitive to inductive to wave-sustained rf discharges
Modeling the transitions from capacitive to inductive to wave-sustained rf discharges
ML
M. A. Lieberman
M. A. Lieberman
RB
R. W. Boswell
R. W. Boswell
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1 October 1998
journal article
Published by
EDP Sciences
in
Journal de Physique IV
Vol. 08
(PR7)
,
Pr7-145
https://doi.org/10.1051/jp4:1998712
Abstract
No abstract available
Cited by 24 articles