Studies of dissolution phenomena in microlithography
- 1 February 1987
- journal article
- research article
- Published by Wiley in Polymer Engineering & Science
- Vol. 27 (4), 282-285
- https://doi.org/10.1002/pen.760270408
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Effects of molecular weight and plasticization on dissolution rates of thin polymer filmsPolymer, 1985
- In-situ measurement of dielectric thickness during etching or developing processesIEEE Transactions on Electron Devices, 1975