Improved EOT and leakage current for metal–insulator–metal capacitor stacks with rutile TiO2
- 31 July 2011
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 88 (7), 1517-1520
- https://doi.org/10.1016/j.mee.2011.03.063
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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