Photo-Polymer Microchannel Technologies and Applications
- 1 January 1998
- book chapter
- conference paper
- Published by Springer Science and Business Media LLC
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- High-aspect-ratio, ultrathick, negative-tone near-uv photoresist for MEMS applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Microfluidic plastic capillaries on silicon substrates: a new inexpensive technology for bioanalysis chipsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micro fluid sensors and actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resistMicrosystem Technologies, 1998