Gegeneration of a Microwave Plasma Using Traveling Waves

Abstract

A uniform and active 2.45 GHz microwave plasma is generated with traveling waves in a large area, 180 x300 mm², along a dielectric line. The brightness temperature of the Ar plasma is within 644°C ± 17°C. The electron temperature and density at 200 Pa are about 4 eV and 4 x10¹¹ cm^-3 respectively, and of the same order with these in small microwave plasma generators. The plasma area can easily be enlarged.