Nano-Structure Fabrication and Manipulation by the Cantilever Oscillation of an Atomic Force Microscope
- 1 December 1999
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 38 (12S), 7257
- https://doi.org/10.1143/jjap.38.7257
Abstract
Nanometer scale mechanical processing of semi-insulating GaAs surface was performed using a cantilever oscillating atomic force microscope. Oscillating probe tips induce bond breaking of the GaAs surface and generate nano-meter size patterns. The size of the pattern is shown to be fully controlled by the amplitude and the frequency of the external modulation voltage to the piezo-scanner.Keywords
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