Microstructures of ITO films deposited by d.c. magnetron sputtering with H2O introduction
- 27 October 2003
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 445 (2), 235-240
- https://doi.org/10.1016/s0040-6090(03)01168-4
Abstract
No abstract availableKeywords
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