Measuring Motions of MEMS
- 1 April 2001
- journal article
- Published by Springer Science and Business Media LLC in MRS Bulletin
- Vol. 26 (4), 305-306
- https://doi.org/10.1557/mrs2001.66
Abstract
Testing microelectromechanical systems (MEMS) includes testing a variety of electrical and mechanical signals. While powerful tools are available to test the electrical behavior of microfabricated systems, relatively few tools are available to measure micromechanical behavior.Keywords
This publication has 5 references indexed in Scilit:
- A system for automatic electrical and optical characterization of microelectromechanical devicesJournal of Microelectromechanical Systems, 1999
- Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolutionJournal of Microelectromechanical Systems, 1998
- Using a light microscope to measure motions with nanometer accuracyOptical Engineering, 1998
- Statistics of subpixel registration algorithms based on spatiotemporal gradients or block matchingOptical Engineering, 1998
- A system for the dynamic characterization of microstructuresJournal of Microelectromechanical Systems, 1997