Composition modulation in liquid phase epitaxial InxGa1−xAsyP1−y layers lattice matched to InP substrates

Abstract

Liquid phase epitaxial layers of In_xGa_1−xAs_yP_1−y grown lattice matched to InP〈001〉 substrates, in the concentration range 0.53⩽x⩽0.88, have been studied by transmission electron microscopy. For the usual growth temperatures, solid instability was predicted for compositions in the range 0.55≲x≲0.75. Indeed a quasiperiodic variation of a strain contrast, though very light in some cases, is always observed in the 〈100〉 and 〈010〉 directions in that composition range, and never outside. The pseudoperiodicity is of the order of 1000 Å. Local concentration measurements have been performed on one sample using a scanning transmission electron microscope. They show that the strain contrast, quite strong in that sample, is related to a concentration modulation. The measured variations on x and y are as high as 0.1, and they keep the ratio x/y constant, which is consistent with phase separation observed on nucleated In_xGa1_−xAs_yP1_−y.