Stiction, Adhesion Energy and the Casimir Effect in Micromechanical Systems

Abstract

We measure the adhesion energy of gold using a micromachined doubly-clamped beam. The stress and stiffness of the beam are characterized by measuring the spectrum of mechanical vibrations and the deflection due to an external force. To determine the adhesion energy we induce stiction between the beam and a nearby surface by capillary forces. Subsequent analysis yields a value $\gamma =0.06$ J/m$^{2}$ that is a factor of approximately six smaller than predicted by idealized theory. This discrepancy may be resolved with revised models that include surface roughness and the effect of adsorbed monolayers intervening between the contacting surfaces in these mesoscopic structures.