Thermal, Mechanical and Electrical Properties of Pd-Based Thin-Film Metallic Glass
- 1 September 2001
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 40 (9R)
- https://doi.org/10.1143/jjap.40.5382
Abstract
As a kind of amorphous alloy, metallic glasses are suitable materials for micromachines because their size effect is considered to be absent. However, neither the fabrication process nor the physical properties of thin-film metallic glasses (TFMGs) have yet been examined. In this paper, Pd-based (Pd76Cu7Si17, atomic composition) TFMG was first fabricated by an RF-magnetron sputtering method. The existence of a supercooled liquid region (SCLR) and the thermal stability with respect to crystallization were measured by a differential scanning calorimeter (DSC). The existence of the SCLR was reconfirmed by a thermomechanical analyzer (TMA). The hardness of Pd-TFMG was measured by a mechanical testing machine for micro-sized specimens (MMT2000), while the Young's modulus was measured by a MMT2000 in the bending mode as well as by a TMA in the tensile mode. The resistivity of Pd-TFMG was tested by the four-point probe method. Finally, the influences of deposition conditions were discussed and the physical properties of TFMG were compared with those of Pd-based bulk metallic glass.Keywords
This publication has 18 references indexed in Scilit:
- Mechanically alloyed Zr55Al10Cu30Ni5 metallic glass composites containing nanocrystalline W particlesJournal of Applied Physics, 1999
- Fluence effects on the magnetic properties of Fe81B13.5Si3.5C2 metallic glass produced by pulsed laser depositionJournal of Applied Physics, 1999
- Rheological Behavior of Superplastic Nanocrystalline and Amorphous MaterialsMaterials Science Forum, 1999
- Thermodynamics and kinetics of the Mg65Cu25Y10 bulk metallic glass forming liquidJournal of Applied Physics, 1998
- Effect of Ar gas pressure on growth, structure, and mechanical properties of sputtered Ti, Al, TiAl, and Ti3Al filmsThin Solid Films, 1995
- Mechanical properties of thin filmsMetallurgical Transactions A, 1989
- Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin filmsJournal of Materials Research, 1988
- Glassy metalsReports on Progress in Physics, 1980
- The influence of structural relaxation on the density and Young’s modulus of metallic glassesJournal of Applied Physics, 1978
- Formation, stability and structure of palladium-silicon based alloy glassesActa Metallurgica, 1969