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Structuring of various materials using cluster ions
Home
Publications
Structuring of various materials using cluster ions
Structuring of various materials using cluster ions
PH
P. R. W. Henkes
P. R. W. Henkes
BK
B. Krevet
B. Krevet
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1 July 1995
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 13
(4)
,
2133-2137
https://doi.org/10.1116/1.579531
Abstract
No abstract available
Cited by 7 articles