Nucleation and growth of AlN nanocrystallites prepared by N+2 implantation
- 31 May 1998
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 103-104, 415-420
- https://doi.org/10.1016/s0257-8972(98)00433-2
Abstract
No abstract availableKeywords
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